Feature-Scale Simulations of Particulate Slurry Flows in Chemical Mechanical Polishing by Smoothed Particle Hydrodynamics. Commun. Comput. Phys. [Internet]. 2014 Nov. 8 [cited 2026 Mar. 15];16(5):1389-418. Available from: https://gsp.tricubic.dev/cicp/article/view/6252